Polyurethane (PU) Polishing Pad for Wafer Surface
Polyurethane (PU) Polishing Pad
Polishing and finishing of glass, LCD/LED substrates, precision optics, hard disk, metal and semiconductor wafer surfaces
Model: MSH-66, MSH-77, MSH-13, MSH-LAERS, MSH-46
Thickness: 0.02″ (0.508 mm) – 0.20″ (5.08 mm)
According to the different application fields of different polishing pads, optical products are divided into 4 categories:
♦ Ordinary optics, such as touch screen glass (including Windows glass, mobile phone glass, PAD, LCD glass can also fall into this category)
♦ Precision optics, all kinds of optical lenses, prisms, quartz glass, filters (blue glass), collimators
♦ Gallium arsenide, silicon carbide, sapphire substrate and epitaxial wafers, semiconductor wafers, and precision ceramics (zirconia ceramics, aluminum nitride ceramics)
♦ Infrared laser (such as this year’s epidemic, the infrared industry is very hot, temperature control gun use is large)
Thickness For Polyurethane Polishing Pad
Standard thickness for PU polishing pads ranges from 0.020 inches (0.508 mm) to 0.20 inch (5.08 mm)
Model | Filler | Average Density G / cm³ (Ib / ft³ ) | Average Hardness shore – A | Application Area |
MSH- 66 |
cerium oxide | 0.42 (26) | 78 | Glass Crystal Metal Ceramic |
MSH- 77 |
cerium oxide | 0.43 (27) | 78 | Glass Crystal |
MSH- 13 |
cerium oxide | 0.35 (22) | 66 | Glass Crystal |
MSH- LASER |
zirconium oxide | 0.59 (37) | 90 | Glass Metal Ceramic |
MSH- 46 |
zirconium oxide | 0.40 (25) | 74 | Glass Crystal |
MSH- 26 |
zirconium oxide | 0.57 (36) | 88 | Glass Crystal |
MSH- 57 |
none | 0.51 (32) | 88 | Glass Metal Ceramic Crystal |
MSH- 87 |
none | 0.77 (49) | 96 | Glass Metal Ceramic Crystal |
Shape | Dimensions (inches / mm) | |
Rectangle | 23 x 55 “ | 584.2 x 1397 mm |
36 x 71 “ | 914 x 1803 mm | |
Square | 42 x 42 “ | 1066 x 1066 mm |
52 x 52 “ | 1320 x 1320 mm | |
Roundness | φ 26 “ | 660 mm |
φ 32 “ | 812 mm | |
φ 38 “ | 965 mm | |
φ 52 “ | 1320 mm | |
Custom sizes, shapes and configurations are available |
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